scia Coat 500

The scia Coat 500 is designed for the homogeneous coating of large substrates, ideal for precision optics. With recipe-controlled deposition processes, it ensures repeatable quality for multilayer stacks. A customisable shaper system (up to 4 shapers) compensates for material- or parameter-dependent inhomogeneity effects, enabling the deposition of precisely defined gradient films.

Key features:

• Excellent uniformity due to linear movement
• Up to 6 water-cooled target materials on a rotational holder for in-situ change
• Recipe controlled multilayer deposition with quartz crystal oscillator and/or optical thickness monitor (OTM)
• Controlled movement of linear axis system for gradient coating or surface error correction
• Optional substrate heating up to 250 °C to optimize film stress